Size Effects in MEMS Failure Mechanics

Experiments with microscale notches of variable radius of curvature and stress concentration factor reveal specimen size effects in failure of brittle materials used in MEMS

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RELEVANT PUBLICATIONS

  1. A. McCarty and I. Chasiotis, "Description of Brittle Failure of Non-uniform MEMS Geometries", Thin Solid Films 515, pp. 3267-3276, (2007).
     
  2. I. Chasiotis, W.G. Knauss, "The Mechanical Strength of Polysilicon Films: 1. The Influence of  Fabrication Governed Surface Conditions", J. of the Mechanics and Physics of Solids 51 (8) pp. 1533-1550, (2003).
     
  3. I. Chasiotis, W.G. Knauss, "The Mechanical Strength of Polysilicon Films: 2. Size Effects Associated with Elliptical and Circular Perforations", J. of the Mechanics and Physics of Solids 51 (8), pp. 1551-1572, (2003).

College of Engineering   University of Illinois at Urbana-Champaign