NANOMECHANICS AND MATERIALS RESEARCH LABORATORY

Thin Film Materials for MEMS

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  1. D. Das, L. Sanchez, J. Martin, B. Power, S. Isaacson, R.G. Polcawich, I. Chasiotis. Control of Ferroelectric Properties of PbZr0.52Ti0.48O3 (PZT) Films through Texture. Journal of the American Ceramics Society 101, pp. 2965–2975, (2018).

  2. D. Das, L. Sanchez, J. Martin, B. Power, S. Isaacson, R.G. Polcawich, I. Chasiotis, “Control of the Mechanical Response of Freestanding of PbZr0.52Ti0.48O3 (PZT) Films through Texture”, Applied Physics Letters 109, pp. 131905, (2016).

  3. D. Das, B. Power, J.P. Martin, R.G. Polcawich, I. Chasiotis, “Role of Oxide Seed Layer in Plastic Response of Epitaxially Grown Textured Metal Films”, Acta Materialia 112, pp. 390-402, (2016).

  4. N. Karanjgaokar, I. Chasiotis, “Creep Behavior of Nanocrystalline Au Films as a Function of Temperature”, Journal of Materials Science 51, pp. 3701-3714, (2016).

  5. S. Yagnamurthy, B. Boyce and I. Chasiotis, “Role of Microstructure and Doping on the Mechanical Strength and Toughness of Polysilicon Thin Films”, Journal of Microelectromechanical Systems 24 (5), pp. 1436 - 1452, (2015).

  6. M. Naraghi, P.V. Kolluru, and I. Chasiotis, “Time and Strain Rate Dependent Mechanical Behavior of Amorphous Polymeric Nanofibers”, Journal of the Mechanics and Physics of Solids 62, pp. 257–275, (2014).

  7. N. Karanjgaokar, F. Stump, P. Geubelle, and I. Chasiotis, “A Thermally Activated Model for Room Temperature Creep in Nanocrystalline Au Films at Intermediate Stresses”, Scripta Materialia 68, pp. 551-554, (2013).

  8. N. Karanjgaokar, C. Oh, J. Lambros, and I. Chasiotis, “Temperature and Strain Rate Effects on the Mechanical Behavior of Nanocrystalline Au Thin Films”, Acta Materialia 60, pp. 5352–5361, (2012).

  9. F.V. Stump, N. Karanjgaokar, P.H. Geubelle, and I. Chasiotis, “A Multiscale Model of Rate Dependence of Nanocrystalline Thin Films”, Journal for Multiscale Computational Engineering 10(5), pp 441-459, (2012).

  10. S. Yagnamurthy, I. Chasiotis, J. Lambros, R. Polcawich, J. Pulskamp, M. Dubey, “Mechanical and Ferroelectric Behavior of PZT Thin Films,” Journal of Microelectromechanical Systems 20, pp. 1250-1258, (2011).

  11. N. Karanjgaokar, C. Oh, and I. Chasiotis, “Microscale Experiments at Elevated Temperatures Evaluated with Digital Image Correlation”, Experimental Mechanics 51, pp. 609-618, (2011).

  12. M. Naraghi, T. Ozkan, I. Chasiotis, S. S. Hazra, and M. P. de Boer “MEMS platform for on-chip nanomechanical experiments with strong and highly ductile nanofibers”, Journal of Micromechanics and Microengineering 20, pp. 125022-1-9, (2010).

  13. K. Jonnalagadda, N. Karanjgaokar, I. Chasiotis, J. Chee, and D. Peroulis, “Strain Rate Sensitivity of Nanocrystalline Au Films at Room Temperature”, Acta Materialia 58, pp. 4674-4684, (2010).

  14. J. Kimberley, J. Lambros, I. Chasiotis, R. Polcawich, J. Pulskamp, and M. Dubey, “Mechanics of energy transfer and failure of ductile microbeams subjected to dynamic loading”, Journal of the Mechanics and Physics of Solids 58, pp. 1125–1138, (2010).

  15. K. Jonnalagadda, I. Chasiotis, J. Lambros, R. Polcawich, J. Pulskamp, and M. Dubey, “Experimental Investigation of Strain Rate Dependence in Nanocrystalline Pt Films,” Experimental Mechanics 50 (1), pp. 25-35, (2010).

  16. J. Kimberley, J. Lambros, I. Chasiotis, R. Polcawich, J. Pulskamp, and M. Dubey, “A hybrid experimental/numerical investigation of the response of multilayered MEMS devices to dynamic loading,” Experimental Mechanics 50 (4), pp. 527-544, (2010).

  17. J. Kimberley, R.S. Cooney, J. Lambros, I. Chasiotis, and Barker N.S., “Failure of Au RF-MEMS Switches Subjected to Dynamic Loading”, Sensors and Actuators A: Physical 154, pp. 140-148, (2009).

  18. K. Jonnalagadda, I. Chasiotis, (invited) “Strength and Fracture Resistance of Amorphous Diamond-like Carbon Films for MEMS”, Journal of Nanomaterials, Article ID 204281, pp.1-8, (2009). doi:10.1155/2009/204281

  19. B.L. Boyce, R. Ballarini, and I. Chasiotis, “An Argument for Proof Testing Brittle Microsystems in High-reliability Applications,” Journal of Micromechanics and Microengineering 18, pp. 117001-4, (2008).

  20. K. Jonnalagadda, S. Cho, I. Chasiotis, T.A. Friedman, and J. Sullivan, “Effect of Intrinsic Stress Gradient on the Effective Mode-I Fracture Toughness of Amorphous Diamond-like Carbon Films for MEMS,” Journal of the Mechanics and Physics of Solids 56, pp. 388-401, (2008).

  21. J. Kimberley, I. Chasiotis, and J. Lambros, “Failure of Microelectromechanical Systems Subjected to Impulse Loads”, International Journal of Solids and Structures 45, pp. 497-512, (2007).

  22. S.W. Cho, K. Jonnalagadda, and I. Chasiotis, (Invited) "Mode I and Mixed Mode Fracture of Polysilicon for MEMS," Fatigue and Fracture of Engineering Materials and Structures 30, pp. 21-31, (2007).

  23. J.R. Stanec, C.H. Smith III, I. Chasiotis, and N.S. Barker, "Realization of Low-Stress Au Cantilever Beams," Journal of Micromechanics and Microengineering 17, pp. N7-N10, (2007).

  24. S.W. Cho and I. Chasiotis, "Elastic Properties and Representative Volume Element of Polycrystalline Silicon for MEMS," Experimental Mechanics 47 (1), pp. 37-49, (2007).

  25. A. McCarty and I. Chasiotis, "Description of Brittle Failure of Non-uniform MEMS Geometries", Thin Solid Films 515, pp. 3267-3276, (2007).

  26. I. Chasiotis, C. Bateson, K. Timpano, A. McCarty, N. S. Barker, J. Stanec, "Strain Rate Effects on the Mechanical Behavior of Nanocrystalline Au Films," Thin Solid Films 515, pp. 3183-3189, (2007).

  27. I. Chasiotis, S.W. Cho, K. Jonnalagadda, "Fracture Toughness and Crack Growth in Polycrystalline Silicon", Journal of Applied Mechanics 73 (5) , pp. 714-722, (2006).

  28. S.W. Cho and I. Chasiotis, T.A. Friedman, and J. Sullivan, "Direct Measurements of Young’s Modulus, Poisson Ratio and Failure Properties of ta-C MEMS," Journal of Micromechanics and Microengineering 15, pp. 728-735, (2005).

  29. S. Cho, J.F. Cardenas-Garcia, and I. Chasiotis, "Measurement of Nano-displacements and Elastic Properties of MEMS via the Microscopic Hole Method," Sensors and Actuators A Physical 120, pp. 163-171, (2005).

  30. H. Kahn, C. Deeb, I. Chasiotis, and A.H. Heuer, "Anodic oxidation during MEMS processing of silicon and polysilicon: native oxides can be thicker than you think," Journal of Microelectromechanical Systems 14 (5), pp. 914-923, (2005).

  31. I. Chasiotis, Invited Paper: "Mechanics of Thin Films and Microdevices", IEEE Transactions of Devices, Materials, and Reliability 4 (2), pp. 176-188, (2004).

  32. I. Chasiotis, W.G. Knauss, "The Mechanical Strength of Polysilicon Films: 1. The Influence of Fabrication Governed Surface Conditions", J. of the Mechanics and Physics of Solids 51 (8) pp. 1533-1550, (2003).

  33. I. Chasiotis, W.G. Knauss, "The Mechanical Strength of Polysilicon Films: 2. Size Effects Associated with Elliptical and Circular Perforations", J. of the Mechanics and Physics of Solids 51 (8), pp. 1551-1572, (2003).

  34. W.G. Knauss, I. Chasiotis, Y. Huang, "Mechanical Measurements at the Micron and Nanometer Scales", Mechanics of Materials 35 (3-6), pp. 217-231, (2003).

  35. I. Chasiotis, W.G. Knauss, "A New Microtensile Tester for the Study of MEMS Materials with the aid of Atomic Force Microscopy", Experimental Mechanics 42 (1), pp. 51-57, (2002).

  36. D.A. LaVan, T. Tsuchiya, G. Coles, W.G. Knauss, I. Chasiotis, D. Read, "Cross Comparison of Direct Tensile Techniques on SUMMiT Polysilicon Films", Mechanical Properties of Structural Films, ASTM STP 1413, pp. 1-12, (2001).

  37. I. Chasiotis, “Progress through Mechanics: The Era of Microelectromechanics and Nanotechnology”, Mechanics 17 (2), pp. 7-8, (2000).
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